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TFT-LCD ITO line AOI inspection machine
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TFT-LCD ITO line AOI inspection machine

TFT-LCD ITO line AOI inspection machine

The ITO line AOI inspection machine (also known as the step electrode automatic inspection machine, terminal scratch automatic inspection machine) is mainly used for defect detection of ITO in the exposed area of TFT-LCD lines, improving production line yield and the process control capability of manufacturers. Mainly detecting scratches, short circuits, open circuits, micro breaks, foreign objects (dirt), corrosion, burrs, etc. The equipment can be widely used in fields such as TFT-LCD industry, touch screen industry, photovoltaic industry, and LED industry, achieving rapid detection of ITO lines, silver paste lines, etc. on glass substrates or flexible substrates (PET, CPI, etc.).

Item

Parameter

 

Model

D3 offline series/D4 online series

Machine Vision System

LCD Size

TFT-LCD size: 1.8-40 inches, maximum 1000 x 480mm, suitable for detecting irregular screens

Check Area

Covering the entire glass ITO circuit, including Fanout area circuit, CFOG Pad area circuit, etc. (beyond 15um from the edge of the TFT polarizer)

Line Type

Detect straight lines, wavy lines, corner lines, cross lines, bright and dark lines (contrast differences), bonded area blocks, etc., and filter out misjudgments caused by IC pad lines, ACF cured colors, line intersections, etc

Defect type

Line scratches, micro scratches, short circuits, open circuits, micro breaks, foreign objects (dirt), corrosion, burrs, etc

Accuracy

Minimum detectable defect size 2um × 2um

Leakage

0 DPPM (missed detection rate: number of missed detections on the production line/number of scratches during inspection)

Over Kill

<5%, with an average misjudgment of<2 images/piece

Operating Rate

>90%

*Takt Time

7-12 Inch Panel Double Steps 7sec

12-17 Inch Panel Double Steps 10sec

17-24 Inch Panel Double Steps 12sec

24-45 Inch Panel Double Steps 15sec

Model Change

New model switching time:<60 minutes

Existing model switching time:<20 minutes

optical system

Area array high-precision camera

Customized coaxial light source

Customize high-resolution 4X or 10X objective lenses based on actual needs

Visual Positioning

Support panoramic positioning or Mark positioning

Electromechanical system

Sheet metal frame structure+marble platform to enhance equipment stability and plane reference

Using a dual head linear motor for transplanting and transporting materials, with high precision and speed

The testing institution adopts high-precision linear motor with a resolution of 0.1um

Adopting DD motor rotating platform, high-precision and high rigidity

Adopting servo motor and high-precision screw module, used for material code reading, visual positioning calibration and other mechanisms

Adopting SMC pneumatic and vacuum system

Loading and unloading

Card clip storage mode

Tray disk storage mode

CV transmission mode

Material box conveying mode

 Cell Transfer

CV conveyor, anti-static belt conveyor

Four axis/six axis robot handling

Multi axis servo motor+linear module architecture for transportation

Forklift handling and transportation

Flip over

Software System

Otek with proprietary intellectual property rights ® AOI Industrial Application Testing Software

Usability: intuitive and user-friendly graphical display interface, intelligent parameter setting function

Humanized, optional alarm function, and customizable alarm function (such as defect rate upper limit alarm function)

Quick switching function: Different products can edit and call different recipes

Data security and fast positioning: Abnormal images can be 100% saved and retained: OK saved image+NG thrown material saved image; The image can be zoomed in and out, and the abnormal location of AOI inspection can be identified; Abnormal images stored for more than three months, with a minimum storage space of 2T

Advanced permission settings: equipped with a window for adjusting the interception rate and setting different permissions

Quick integration with customer information system interface: The detection result data can be saved and uploaded to the CIM system

Algorithm

Algorithm

Otek ® AOI detection algorithm+AI artificial intelligence re evaluation system

QR codes

Supports reading multiple Vericode codes, corresponding to Normal Type, Normal HD Type Vericode, Outline Type Vericode, and DM Type Vericode

Other

Safety

Safety grating/safety door lock: used for personnel safety protection

FFU: Used for clean equipment to achieve Class 1000 and Class 100 cleanrooms in internal spaces

Static electricity: The material in contact with the product is made of anti-static material and equipped with an ion air rod to eliminate static electricity

Power

AC 220V±10% 50~60Hz

Grounding

The resistance between any two grounding points of the entire machine is less than 5 Ω

Ionizing Air Blower

The ion dissipation rate in the homework area is less than 5 seconds; Ionic equilibrium voltage within 100V

Environment

Temperature: 5-40

Humidity: 25~85% RH (without condensation)

 Temperature

40

Positive pressure

0.5~0.6MPa, access port provided by the manufacturer

Negative pressure

-80kpa, access port provided by the manufacturer

Defect image

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